CPW Dependent Loss Analysis of Capacitive Shunt RF MEMS Switch
Keywords:
Artificial neural network, capacitive shunt switch, CPW, isolation loss, RF MEMS switchAbstract
CPW (CoPlanar Waveguide) plays major role in design of RF MEMS switch to improve the performance in terms of losses and required bandwidth of operation. This paper proposes the analyses of the mechanical characteristics on the electrical performance of the Capacitive Shunt RF MEMS (CSRM) switch based on various CPW structures and contact area roughness of the switch using electromagnetic 2.5D ADS simulator. The result of momentum method was analyzed up to the K-band frequency of 100 GHz. The result shows that the CSRM switch with two conductor CPW coupler has a maximum isolation of -46 dB with operating bandwidth up to 90 GHz at the resonant frequency of 50 GHz. In order to validate the obtained result, Artificial Neural Network (ANN) has been trained using ADS result. Comparison shows good agreement between ADS and ANN results.
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