Equivalent Network Approach for the Simulation of MEMS Devices
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Equivalent Network Approach for the Simulation of MEMS DevicesAbstract
In this paper a numerical approach for the analysis of the behaviour of micro electro mechanical systems (MEMS) is presented. The method is applied to the simulation of movable plate MEMS variable capacitors that are of common use in the CMOS voltage controlled oscillators (VCOs). An accurate study of MEMS devices requires a coupled electro-mechanical analysis. The mechanical analysis has to take into account the deformation of the plates of the capacitor and the electromagnetic one has to consider the distribution of charges and currents and the presence of dielectric materials. We first perform a coupled elastic-electrostatic analysis in order to obtain the tuning characteristic of the system; subsequently, once the positions of the plates have been determined, an electromagnetic analysis of the system is performed via an integral formulation based on an electric equivalent circuit. The proposed method has been validated by analysing two and three plate tuneable parallel-plate capacitors.
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References
S. D. Senturia, N. Aluru, J. White, “Simulating the
behaviour of MEMS Devices: Computational Methods
and Needs,” IEEE Computational Science &
Engineering, pp. 30-43, January – March 1997.
S. D: Senturia, “CAD Challenge for Microsensors,
Microactuators, and Microsystems,” Proceedings of the
IEEE, Vol. 86, No. 8, pp. 1611 – 1626, August 1998.
J J. Yao, “RF MEMS from a device perspective,” J.
Micromech. Microeng. 10, pp. 9-38, 2000.
N. Bushyager, B. McGarvey, E. M. Tentzeris, “
Introduction of an Adaptive Modeling Technique for the
Simulation of RF Structures Requiring the Coupling of
Maxwell’s, Mechanical, and Solid – State Equations,”
ACES Journal, Vol 17, No. 1 pp. 104-111, March 2002.
M. Kuroda, N. Miura, M. M. Tentzeris, “A Novel
Numerical Approach for the Analysis of Ed MEMS –
Based Variable Capacitors with Motion to Arbitrary
Directions,” The 19 Th Annual Rev. of Progress in Applied
Computational Electromagnetic, pp. 48- 53, Monterey
March 2003.
A. Dec, K. Suyama, “Micromachined Electro-
Mechanically Tunable Capacitors and Their Applications
to RF IC’s,” IEEE Transactions on Microwave Theory
and Techniques, Vol. 46, No. 12, pp. 2587-2596,
December 1998.
A. Dec, K. Suyama, “A 1.9-GHz CMOS VCO with
Micromachined Electromechanically Tunable
Capacitors,” IEEE Journal of Solid-State Circuits, Vol.
, No. 8, pp. 1231-1237, August 2000.
A. Dec, K. Suyama, “Microwave MEMS-Based Voltage-
Control Oscillators,” IEEE Transactions on Microwave
Theory and Techniques, Vol. 48. No. 11, pp. 1943- 1949,
November 2000
E. S. Hung, S. D. Senturia, “Generating Efficient
Dynamical Models for Microelectromechanical Systems
from a Few Finite-Element Simulation Runs,” IEEE
ACES JOURNAL, VOL. 21, NO. 1, MARCH 2006
Journal of Microelectromechanical Systems, Vol. 89, No.
, pp.280-289, September 1999.
Ansys User Manual, Ansoft Corp.
R. F. Harrington, Field Computation by Moment Method,
Mcmillan New York, 1968.
A. E. Ruehli, P.A. Brennan, “Efficient Capacitance
Calculations for Three-Dimensional Multiconductor
Systems,” IEEE Trans. Microwave Theory and
Techniques, Vol. 21, pp. 76–82, Feb. 1973.
N. Esposito, A. Musolino, M. Raugi “Modelling of three
dimensional nonlinear eddy current problems with
conductors in motion by an integral formulation”, IEEE
Trans. On Magn. Vol 32, No. 3, pp. 764-767, May 1996.
D. F. Kelley, R. L. Luebbers, “Piecewise Linear
Recursive Convolution for Dispersive Media Using
FTDT” IEEE Trans. On Ant. And Prop., Vol. 46, No. 6,
pp. 792-797, June 1996.
