Introduction of an Adaptive Modeling Technique for the Simulation of RF Structures Requiring the Coupling of Maxwell’s, Mechanical, and Solid-State Equations
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Introduction of an Adaptive Modeling Technique for the Simulation of RF Structures Requiring the Coupling of Maxwell’s, Mechanical, and Solid-State EquationsAbstract
As RF technologies mature designing complex RF systems is becoming an increasingly difficult task. Modern systems include components that cannot be modeled with traditional simulators. This paper introduces a modeling technique for use in RF systems that combines Maxwell’s, mechanical, and solid-state equations. The resulting simulator can be used to simulate microelectromechanical structures (MEMS) and semiconductor devices. The motion coupling technique is applied to a MEMS parallel plate capacitor for demonstration purposes.
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