A Study on Equivalent Circuit Model of RF Discharge Based on Multi-Physics Field
Keywords:
Equivalent circuit model, multi-physics simulation, RF dischargeAbstract
Belongs to EMC problems, the equivalent circuit model of RF discharge is studied. By establishing the correlation between circuit parameters of equivalent circuit and plasma characteristics, this paper conducts a brief analysis on the RF discharge mechanism with different frequencies.
Downloads
References
MIL-STD-464C, Electromagnetic environmental effects requirements for systems, pp. 11-17, 2010.
X. Xueji and Z. Dingchang. Gas-Discharge-Physics. Fudan University Press, pp. 268-292, 1996.
M. A. Lieberman, “Analytical solution for capacitive RF sheath,” IEEE Trans. Plasma Sci., vol. PS-16, pp. 638444, 1988.
V. A. Godyak and N. Stemberg, “Dynamic model of the electrode sheaths in symmetrically driven RF discharges,” Phys. Rev. A, vol. 42, pp. 2299-2312, 1990.
M. A. Lieberman and S. E. Savas, “Bias voltage in finite length, cylindrical and coaxial radiofrequency discharges,” J. Vacuum Sci. Technol., vol. A8, pp. 1632-1641, 1990.
C. M. Horwitz, “RF sputtering voltage division between two electrodes,” J. Vacuum Sci. Technol., vol. AI, pp. 60-68, 1983.
A. J. Van Roosmalen, “Plasma parameter estimation from RF impedance measurements in a dry etching system,” Appl. Phys. Lett., vol. 42, pp. 416-418, 1983.
A. I. Van Roosmalen, W. G. M. van den Hoek, and H. Kalter, “Electrical properties of planar RF discharges for dry etching,” J. Appl. Phys., vol. 58, pp. 653458, 1985.
K. D. Allen, H. H. Sawin, M. T. Mocella, and M. W. Jenkins, “The plasma etching of polysilicon with CFsCVargon discharges: I. Parametric modeling and impedance analysis,” J. Electrochem. Soc., vol. 133, pp. 2315-2325, 1986.
X. Feng, F. Dai, and X. Fu, “A study on the mechanism of hazards of high intensity radiated field to fuel based on multi-physics field,” Progress in Electromagnetics Research Symposium IEEE, Fall 2018.
X. Feng and F. Dai, “A study on RF discharge characteristics of argon in multi-physics field,” Applied Computational Electromagnetics Society Symposium IEEE, 2017.
C. Qiong, Electromagnetic Compatibility Engineering Handbook. Beijing, National Defense Industrial Press, pp. 196-200; 1255-1256, 1993.
HB5942-86, Size Standard for Aircraft Pressure Refueling Joints, 1986.
HB6130-87, Aircraft Pressure Refueling Dimensions Standard, 1987.
S. Doling and X. Shuguo, Electromagnetic Fields and Waves. Higher Education Press, pp. 315-339, 2009.
Cn.comsol.com. [Online]. Available: http://cn. comsol.com/model/dielectric-barrier-discharge-8637. [Accessed: 20 Jan. 2017].
X. Fu, F. Dai, and F. Zhou, “A study on equivalent circuit model of RF discharge between the oil-inlet and nozzle of aircraft fuel tank,” Applied Computational Electromagnetics Society Symposium IEEE, 2018.
