TWO-DIMENSIONAL COUPLED ELECTROSTATIC-MECHANICAL MODEL FOR RF MEMS SWITCHES
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TWO-DIMENSIONAL COUPLED ELECTROSTATIC-MECHANICAL MODEL FOR RF MEMS SWITCHES摘要
Two-dimensional (2-D) coupled electrostatic-mechanical model of RF MEMS switches has been developed, in which the effect of residual stress due to the fabrication process and axial force resulting from the beam stretching have been taken into account. The electrostatic model is based on the application of the finite difference (FD) technique to quasi-static solution of a 2-D plane cut of the MEMS switch structure. The electrostatic model calculates the induced electrostatic force on the membrane due to the applied dc bias voltage. From the resulting electrostatic potential, the force distribution, the switch capacitance, and the beam deformation have been calculated. The computed pull down voltage for different structures agrees well with published data. The developed simulation program combines the electrostatic and mechanical analyses together and gives accurate results in short running time.
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参考
J. B. Muldavin, G. M. Rebeiz, “High-Isolation
CPW MEMS Shunt Switches-Part 1: Modeling”,
IEEE Transaction on Microwave Theory and
Techniques, Vol. 48, No. 6, pp. 1045-1052, June
E. K. Chan, K. Garikipati, and R. W. Dutton,
“Characterization of Contact Electromechanics
Through Capacitance-Voltage Measurements and
Simulations”, IEEE Journal of MEMS, Vol. 8. No.
, pp. 208-217, June 1999.
J. R. Gilbert, R. Legtenberg, and S. D. Senturia,
“3D coupled electro-mechanics for MEMS:
application of CoSolve-EM,” Proceeding of Int.
IEEE MEMS Conference, pp. 122-127, 1995.
E. K. I. Hamad, A. M. E. Safwat, and A. S. Omar,
“2-D Coupled Electrostatic-Mechanical Model for
Shunt-Capacitive MEMS Switch Based on Matlab
Program,” Proceeding of the IEEE/ACES
International Conference, Honolulu, Hawaii, USA,
April 2005.
Q. Meng, M. Mehregany, and R. L. Mullen,
“Theoretical Modeling of Microfabricated Beams
with Elastically Restrained Supports”, IEEE
Journal of MEMS, Vol. 2, pp. 128-137, Sept. 1993.
B. Choi and E. G. Lovell, “Improved Analysis of
Microbeams under Mechanical and Electrostatic
Loads”, Journal of Micromech Microeng, Vol. 7,
pp. 24–29, 1997.
L. X. Zhang, Y.-P. Zhao, “Electromechanical
Model of RF MEMS Switches”, Microsystem
Technologies 9, pp. 420–426, 2003.
A. Z. Elsherbeni, “The Finite Difference
Technique for Electromagnetic Applications”,
Electrical Engineering Department, The University
of Mississippi, University, MS 38677, USA, May
P. Osterberg, H. Yie, X. Cai, J. White, and S.
Senduria “Self-Consistent Simulation and
Modeling of Electrostatically Deformed
Diaphragms”, Proceeding of Int. IEEE MEMS
Conference, Oiso, Japan, pp. 28-32, January 1994.
S. P. Timoshenko and J. M. Gere “Theory of
Elastic Stability”, McGraw-Hill Inc., New York,
nd ED., 1961.
W. E. Boyce and R. C. Diprima, “Elementary
Differential Equations and Boundary Value
Problems”, John Wiley & Sons, Inc. New York, 6 th
ED. 1997.
