A Novel Numerical Approach for the Analysis of 2D MEMS-Based Variable Capacitors Including the Effect of Arbitrary Motions
关键词:
A Novel Numerical Approach for the Analysis of 2D MEMS-Based Variable Capacitors Including the Effect of Arbitrary Motions摘要
A novel time-domain technique is proposed for the analysis of MEMS-based variable devices involving motion to arbitrary in-plane directions using the adaptive body fitted grid generation method with moving boundaries. MEMS technology is growing rapidly in the RF field and the accurate design of RF MEMS switches that can be used for phase shifting or reconfigurable tuners requires the computationally effective modeling of their transient and steady-state behavior including the accurate analysis of their time-dependent moving boundaries. Due to the limitations of the conventional time-domain numerical techniques, it is tedious to simulate these problems numerically. The new technique proposed in this paper is based on the time-difference time-domain method with an adaptive implementation of grid generation. Employing this transformation, it is possible to apply the grid generation technique to the analysis of geometries with time-changing boundary conditions. A variable capacitor that consists of two metal plates that can move to arbitrary in-plane directions is analyzed as a benchmark. The numerical results expressing the relationship between the velocity of the plates and the capacitance are shown and the transient effect is accurately modeled.
##plugins.generic.usageStats.downloads##
参考
A. Dec, K. Suyama, “Microwave MEMS-Based
Voltage-Controlled Oscillators,” IEEE Trans. MTT, pp.
-1949, vol.48, no. 11, Nov. 2000.
N. Bushyager, B. McGarvey, M. Tentzeris, “Adaptive
numerical modeling of RF Structures requiring the
coupling of Maxwell’s, mechanical and solid-state
equations,” Proc. of the 2001 ACES, pp. 1-6, Monterey,
CA, March 2001.
Mosher Rosenfeldm, Dochan Kwak, “Time dependent
solution of viscous incompressible flow in moving
co-ordinates”, International Journal. for Numerical
Method in Fluid, vol.13, pp. 1311-1328, 1991.
S. Kuroda, H. Ohba, “Numerical analysis of flow around a
rotation square cylinder,” JSME International Journal,
-4, B, pp. 592-597, 1993.
C. Xu, M. Sen, M. Gad-el-Hak, “Dynamics of a Rotatable
Cylinder with Splitter Plate in Uniform Flow,” Journal of
Fluids and Structures, Vol. 7, Issue 4, pp. 401-416, May
P. J. Zwart, G. D.Raithby, “Space-time meshing for two
dimensional moving boundary problems,” Proc. of the 7th
International Meshing Roundtable, Dearborn, Michigan,
October 1998.
M. Kuroda, “A dielectric waveguide with moving
boundary,” IEICE Trans., vol. E74, pp. 3952-3954,
December 1991.
M. Kuroda, “Electromagnetic wave scattering from
perfectly conducting moving boundary-An application of
the body fitted grid generation with moving boundary,”
IEICE Trans., vol. E77-C, No.11, pp. 1735-1739, Nov.
M. Kuroda, S. Kuroda, “FD-TD method for
electromagnetic wave scattering from a moving body by
using the body fitted grid generation with moving
boundary”, Proc. of ICEAA99, pp. 549-552, September
M. Kuroda, S. Kuroda, “An application of body fitted grid
generation method with moving boundaries to solve the
electromagnetic field in a moving boundary,” Proc. of the
Kuroda, et al.: A Novel Numerical Approach for the Analysis of 2D MEMS-Based Variable Capacitors Including the Effect of Arbitrary Motions
ACES, pp. 519-524, Monterey CA, March 2001.
M. Kuroda, K Kawano, M. M. Tentzeris, “Body fitted grid
generation method with moving boundaries and its
application for analysis of MEMS devices,” Proc. of the
ACES, pp. 219-224, Monterey CA, March 2002.
M. Kuroda, N. Miura, M.M. Tentzeris, “A Novel
Time-Domain Technique for the Analysis of
MEMS-Based Variable Capacitors with Moving Metallic
Parts,” Proc. of APMC2002, pp. III.1208-1211, Kyoto,
JAPAN, November 2002.
V. Bladel, “Relativity and Engineering,” Springer-Verg,
Berlin, 1984.
J. F. Thompson, “Numerical grid generation”, North
Holland, Amsterdam, 1985.
A. Taflove, S. Hagness, “Computational Electrodynamics,
The finite difference time domain method,” Boston, Artech
House, 2000
