Comparison of Different Ways of Extra Phosphorus Implantation Which Decrease the Threshold Voltage and On-resistance of UMOS

Authors

  • X. Zhou Institute of Microelectronics Southwest Jiaotong University, Chengdu, 611756, China
  • Q. Y. Feng Institute of Microelectronics Southwest Jiaotong University, Chengdu, 611756, China

Keywords:

Extra phosphorus implantation, on-resistance, threshold voltage, UMOS

Abstract

A method to decrease the threshold voltage and on-resistance is discussed in this paper, which is adding extra phosphorus implantation into silicon. There are two ways to implant extra phosphorus without adding a mask. The first way is to implant extra phosphorus after the field oxide etching, and the second way is to implant extra phosphorus with the source region mask before the N+ implantation. Compare the results of the two ways to find their characteristics and choose the appropriate one.

References

M. Shi and M. Li, Semiconductor Devices Physics and Technology. 3rd ed., Soochow University Press, 2014.

L. Feng, “Threshold voltage model of short-channel MOSFETs,” Changsha: National University of Defense Technology, 2006.

D. Ma, “Study of novel structure and mechanism of trench type ultra-low specific on-resistance power device,” Chengdu: University of Electronic Science and Technology of China, 2017.

Q. Chen, “The characteristics research of 75V trench power MOSFET,” Chengdu: Southwest Jiaotong University, 2013.

B. J. Baliga, Fundamentals of Power Semiconductor Devices. Springer Science & Business Media, 2008.

L. Zhao and Q. Feng, “A novel high voltage MOSFET with double trench gate,” Microelectronics, vol. 49, no. 2, Apr. 2019.

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Published

2020-11-07

How to Cite

X. Zhou, & Q. Y. Feng. (2020). Comparison of Different Ways of Extra Phosphorus Implantation Which Decrease the Threshold Voltage and On-resistance of UMOS. The Applied Computational Electromagnetics Society Journal (ACES), 35(11), 1398–1399. Retrieved from https://journals.riverpublishers.com/index.php/ACES/article/view/7601

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Articles