Geometrical Requirement Analysis of RF-MEMS Switch

Authors

  • Edan Khan Department of Mechanical Engineering, Sharda School of Engineering and Technology, Sharda University, Greater Noida, India
  • Kennedy Sarangapani Department of Mechanical Engineering, Sharda School of Engineering and Technology, Sharda University, Greater Noida, India
  • Dev Sparsh Sangwan Department of Mechanical Engineering, Sharda School of Engineering and Technology, Sharda University, Greater Noida, India

DOI:

https://doi.org/10.13052/jmm1550-4646.21346

Keywords:

RF-MEMS, deflection, sensitivity, stiffness, mechanical analysis, geometry

Abstract

Radio Frequency Micro-Electromechanical Systems (RF MEMS) have rapidly advanced over the past two decades. The integration of MEMS components in RF devices has met the demand for miniaturized components, resulting in compact devices with low power consumption and enhanced RF performance at higher frequencies. The control electrode has both metal-metal contact as well as metal-dielectric later contact in the Co Planer Waveguide (CPW). Besides the intrinsic stress due to the material property and the defects due to processing, the mismatch in the material properties between two different metals in the bimetallic structure affects the reliability of RF cantilever MEMS. For this study, silicon and gold are chosen for bimetallic structure and the deflection, sensitivity, and stiffness of both materials are analyzed to estimate the mismatch between them. Typical cantilever MEMS structures have been used with the dimension of length varying from 100 μm to 300 μm and the width and thickness of 10μm. The mismatch in deflection, stiffness, and sensitivity between gold and silicon are the important parameters considering the operational limits of RF MEMS. MEMSolver 3.0 is used to calculate the deflection. The assumptions considered during the analysis were uniform beam cross section and the mass of the beam is negligible compared to the load.

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Author Biographies

Edan Khan, Department of Mechanical Engineering, Sharda School of Engineering and Technology, Sharda University, Greater Noida, India

Edan Khan is an undergraduate Mechanical Engineering student with a specialization in Mechatronics at Sharda University. His work blends mechanical design, simulation, and automation. He has contributed to a range of projects, including CFD analysis of funnel flows, hybrid vehicle retrofitting, and integrating mechatronic systems into functional designs. He has published a research paper on composite materials and is currently involved in patent work related to innovative engineering solutions. Edan has also explored areas like MEMS, thermofluids, and battery safety. As Vice-Captain of Team Tornado Racing, he contributes to the team’s design efforts and overall coordination.

Kennedy Sarangapani, Department of Mechanical Engineering, Sharda School of Engineering and Technology, Sharda University, Greater Noida, India

Sarangapani Kennedy is an Associate Professor in the Department of Mechanical Engineering at Sharda University. With over two decades of experience, his research focuses on advanced materials processing, including spark plasma sintering, ceramic coatings, and intermetallics, contributing to innovations in microstructure-property relationships and mechanical performance enhancement.

Dev Sparsh Sangwan, Department of Mechanical Engineering, Sharda School of Engineering and Technology, Sharda University, Greater Noida, India

Dev Sparsh Sangwan is an undergraduate student in Mechanical Mechatronics Engineering at Sharda University. His academic pursuits lie at the intersection of intelligent design and thermal systems, with notable work on a liquid cooling plate optimized through advanced simulation, fin design study focused on enhanced heat dissipation and an cost effective obstacle detection kit developed for assistive mobility solutions. He blends interests in computational fluid dynamics, embedded systems, and automation to explore innovative engineering solutions. Focused on bridging digital tools with physical design, he is driven by the challenge of transforming theoretical insights into practical, real-world applications.

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Published

2025-08-13

How to Cite

Khan, E. ., Sarangapani, K. ., & Sangwan, D. S. . (2025). Geometrical Requirement Analysis of RF-MEMS Switch. Journal of Mobile Multimedia, 21(3-4), 447–454. https://doi.org/10.13052/jmm1550-4646.21346

Issue

2025: Vol 21 Iss 3-4

Section

WPMC 2024